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  • Session 1 - Yield Enhancement I
  • Nested Interconnect Macro Electrical Yield Improvement for Advanced Triple Patterning Integration

    • Mary Claire Silvestre, Globalfoundries ;
    • Ming He, Globalfoundries ;
    • Anbu Selvam KM Mahalingam, Globalfoundries ;
    • Craig Child, Globalfoundries ;
    • Alycia Roux, Globalfoundries ;
    • Chun Hui Low, Globalfoundries ;
    • Daniel Fisher, Globalfoundries ;
    • Zhou Yue, Globalfoundries ;
    • Park DeNeil, Globalfoundries ;
    • Mert Karakoy, Globalfoundries