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  • Session 1 - Yield Enhancement I
  • 1.5 Defect Improvement by Optimizing Electroplating in BEOL Sub-50nm Pitch

    • Ketan Shah, Global Foundries ;
    • Shafaat Ahmed, Global Foundries ;
    • Tien Jen Cheng, Global Foundries ;
    • Adam daSilva, Global Foundries ;
    • Mukta Sharma, Global Foundries ;
    • Anbu Selvam KM Mahalingam, Globalfoundries ;
    • Dinesh Koli, Global Foundries ;
    • Stephan Grunow, Global Foundries ;
    • Craig Child, Globalfoundries

    Defect Improvement by Optimizing Electroplating in BEOL Sub-50nm Pitch