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  • Session 1 - Yield Enhancement I
  • Practical aspects of TMU based analysis for scatterometry model referencing

    • Carsten Hartig, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG ;
    • Alok Vaid, GLOBALFOUNDRIES, Inc. ;
    • Peter Ebersbach, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG ;
    • Daniel Fischer, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG ;
    • Robert Melzer, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG ;
    • Adam Urbanowicz, Nova Measuring Instruments GmbH ;
    • Francisco Sanchez, Nova Measuring Instruments GmbH ;
    • David Mezerette, Nova Measuring Instruments, Inc. ;
    • Yinon Katz, Nova Measuring Instruments, LTD ;
    • Matthew Sendelbach, Nova Measuring Instruments, Inc.