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  • Session 1 - Yield Enhancement I
  • 2.4 Metrology Manufacturing Control Factors: A Holistic Approach for Supporting 14nm and 7nm

    • David Jayez, GLOBALFOUNDRIES ;
    • Alok Vaid, GLOBALFOUNDRIES, Inc. ;
    • Eric Solecky, GLOBALFOUNDRIES ;
    • Michael Lenahan, GLOBALFOUNDRIES ;
    • Dhairya Dixit, GLOBALFOUNDRIES ;
    • Charles Largo, GLOBALFOUNDRIES ;
    • Steven Seipp, GLOBALFOUNDRIES ;
    • Georgios Vakas, GLOBALFOUNDRIES

    Metrology Manufacturing Control Factors: A Holistic Approach for Supporting 14nm and 7nm