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  • Session 1 - Yield Enhancement I
  • 3.2 Stability Study of Native Epitaxial Transistors as Process Probe for Contamination Detection

    • Moshe Agam, ON Semiconductor ;
    • Agajan Suwhanov, ON Semiconductor ;
    • Ashley Lee, ON Semiconductor ;
    • Josh Henninger, ON Semiconductor ;
    • Sallie Hose, ON Semiconductor

    Stability Study of Native Epitaxial Transistors as Process Probe for Contamination Detection