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  • Session 1 - Yield Enhancement I
  • STT-RAM Device Performance Improvement Using CMP Process

    • Sajjad Hassan, Applied Materials Inc. ;
    • Lin Xue, Applied Materials Inc ;
    • Jaesoo Anh, Applied Materials Inc ;
    • Mahendra Pakala, Applied Materials Inc ;
    • Garrett Sin, Applied Materials Inc ;
    • Motoya Okazaki, Applied Materials Inc

    Use this link to view the PDF file: STT-RAM Device Performance Improvement Using CMP Process