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  • Session 1 - Yield Enhancement I
  • 7.1 In-line Metrology for Atomic Resolution Local Height Variation

    • Tae-Gon Kim, imec ;
    • Soon-Wook Kim, imec ;
    • Tom Vandeweyer, imec ;
    • Ah-jin Jo, Park Systems ;
    • Ju Suk Lee, Park Systems ;
    • Byong-Woon Ahn, Park Systems ;
    • Ardavan Zandiatashbar, Park Systems ;
    • Sang-Joon Cho, Park Systems ;
    • Sang-il Park, Park Systems ;
    • Bernd Irmer, Nanotools ;
    • Sebastian Schmidt, Nanotools

    In-line Metrology for Atomic Resolution Local Height Variation