A single link to the first track to allow the export script to build the search page
  • Session 1 - Yield Enhancement I
  • Advanced in-production hotspot prediction and monitoring with micro-topography

    • Stefan Hunsche, ASML US Inc ;
    • Tanbir Hasan, ASML US Inc ;
    • Christopher Prentice, ASML SARL ;
    • Raphael La Greca, ASML SARL ;
    • Niladri Sen, ASML US Inc ;
    • Laurent Depre, ASML S.A.R.L ;
    • Pierre Fanton, STMicroelectronics ;
    • Amine Lakcher, STMicroelectronics ;
    • Bertrand LE-GRATIET, STMicroelectronics ;
    • Jean-Gabriel Simiz, STMicroelectronics