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  • Session 1 - Yield Enhancement I
  • 15.2 Enabling Low Temperature Metal Nitride ALD using Ultra-High Purity Hydrazine

    • Daniel Alvarez, RASIRC ;
    • Jeffrey Spiegelman, RASIRC ;
    • Russell Holmes, RASIRC ;
    • Mark Raynor, Matheson Tri-Gas ;
    • Hank Shimizu, Matheson Tri-Gas ;
    • Keisuke Andachi, RASIRC

    Enabling Low Temperature Metal Nitride ALD using Ultra-High Purity Hydrazine